Ultra Precision Diamond Shaping of an Elliptical Micro-Lens Array

被引：1

作者：

Chao Choung-Lii ^{[1
]}

Chen Chun-Chieh ^{[1
]}

Chou Wen-Chen ^{[1
]}

机构：

[1] Tam Kang Univ, Dept Mech & Electromech Engn, Tamsui 251, Taipei Hsien, Taiwan

来源：

PROGRESS OF MACHINING TECHNOLOGY | 2009年 / 407-408卷

关键词：

Single point diamond shaping; Elliptical; Micro-lens array; REFRACTIVE MICROLENS; REFLOW TECHNIQUE; FABRICATION; TECHNOLOGY; GLASS;

D O I：

10.4028/www.scientific.net/KEM.407-409.380

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Micro lens array is widely used in photonics and telecommunication products, including back-light module of flat panel display devices and white-light LED illumination. The ultra precision diamond shaping method together with tool servo technique was studied and developed in this research to generate elliptical micro lens array. Each elliptical micro lens has radii in X and Y direction of 1.0 mm and 1.5 mm respectively. A high filling-factor (100 %) elliptical micro lens array with form accuracy better than 0.15 mu m and surface roughness around 5nm Ra was successfully fabricated.

引用

页码：380 / 383

页数：4

共 7 条

[1] Microfabrication of microlens array by focused ion beam technology [J].

Fu, YQ ;

Kok, N ;

Bryan, A .

MICROELECTRONIC ENGINEERING, 2000, 54 (3-4) :211-221

[2] Fabrication of concave refractive microlens arrays in solgel glass by a simple proximity-effect-assisted reflow technique [J].

He, M ;

Yuan, XC ;

Bu, L ;

Cheong, WC .

OPTICS LETTERS, 2004, 29 (09) :1007-1009

[3] Reflow technique for the fabrication of an elliptical microlens array in sol-gel material [J].

He, M ;

Yuan, XC ;

Ngo, NQ ;

Cheong, WC ;

Bu, J .

APPLIED OPTICS, 2003, 42 (36) :7174-7178

[4] An investigation of form compensation in fabricating microlens arrays by ultra-precision fast-tool-servo technology [J].

Kwok, Tsz-Chun ;

To, Suet ;

Cheung, Chi-Fai ;

Wang, Su-Juan ;

Lee, Wing-Bun .

ADVANCES IN MATERIALS MANUFACTURING SCIENCE AND TECHNOLOGY II, 2006, 532-533 :689-+

[5] TECHNIQUE FOR MONOLITHIC FABRICATION OF MICROLENS ARRAYS [J].

POPOVIC, ZD ;

SPRAGUE, RA ;

CONNELL, GAN .

APPLIED OPTICS, 1988, 27 (07) :1281-1284

[6] Coding gray-tone mask for refractive microlens fabrication [J].

Yao, J ;

Su, JQ ;

Du, JL ;

Zhang, YX ;

Gao, FH ;

Gao, F ;

Guo, YK ;

Cui, Z .

MICROELECTRONIC ENGINEERING, 2000, 53 (1-4) :531-534

[7] Fabrication of refractive microlens in hybrid SiO2/TiO2 sol-gel glass by electron beam lithography [J].

Yu, WX ;

Yuan, XC .

OPTICS EXPRESS, 2003, 11 (08) :899-903

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