Nontranslational three-dimensional profilometry by chromatic confocal microscopy with dynamically configurable micromirror scanning

A confocal microscope profilometer, which incorporates chromatic depth scanning with a diffractive optical element and a digital micromirror device for cofigurable transverse scanning, provides three-dimensional (3D) quantitative measurements without mechanical translation of either the sample or the microscope. me used a microscope with Various objective lenses (e.g., 40x, 60x, and 100x) to achieve different system characteristics. With a 100x objective, the microscope acquires stable measurements over a 320 mu m x 240 mu m surface area with a depth resolution of 0.39 mu m at a 3-Hz scan rate. The total longitudinal held of view is 26.4 mu m for a wavelength tuning range of 48.3 nm. The FWHM value of the longitudinal point-spread function is measured to be 0.99 mu m. We present 3D measurements of a four-phase-level diffractive element and an integrated-circuit chip. shown to be equivalent to those found with use of conventional mechanical scanning. Society of America OCIS codes: 180.1790, 120.0120.