Tiny Gallium Arsenide probe for electro-optic sampling

Several fabrication methods of electro-optic probe are introduced and the wet chemical etching technique is the most promising to fabricate a tiny probe. The experimental material is Gallium Arsenide crystal whose dielectric constant is small and stability is good. A pyramidal electro-optic probe has been achieved which whole size is smaller than conventional probes and surface is very smooth. So the influence of probe on the measured electric field can be reduced remarkably which will improve the measurement accuracy, and at the same time good spatial resolution would be obtained.