Laser deposition of thin films with varying substrate temperature during film growth

被引:2
|
作者
Song, WD [1 ]
Hong, MH [1 ]
Lu, Y [1 ]
Wang, WJ [1 ]
Huang, SM [1 ]
Pang, SI [1 ]
Xu, Y [1 ]
Goh, Y [1 ]
Liu, XH [1 ]
Chong, TC [1 ]
机构
[1] Data Storage Inst, Laser Microproc Lab, Singapore 117608, Singapore
关键词
laser deposition; barium ferrite films; varying substrate temperature;
D O I
10.1016/S0169-4332(02)00422-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Laser deposition of barium ferrite films with varying substrate temperature during film growth has been studied. It is found that both perpendicular and in-plane coercivities increase with peak substrate temperature and reach 5.2 kOe. The magnetization hysteresis loops are similar for both magnetic fields applied parallel and perpendicular to the substrate surface, indicating that the films exhibit almost isotropic properties. The magnetic properties, grain shape and crystalline orientation of films deposited with varying substrate temperature are close to films deposited with post annealing and differ from films deposited with in situ heating. The total time for preparing films with varying substrate temperature is much shorter than that with post annealing or in situ heating. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:348 / 351
页数:4
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