Knudsen forces on microcantilevers

被引:61
作者
Passian, A
Wig, A
Meriaudeau, F
Ferrell, TL
Thundat, T
机构
[1] Oak Ridge Natl Lab, Oak Ridge, TN 37830 USA
[2] Univ Bourgogne, IUT Creusot, F-71200 Le Creusot, France
关键词
D O I
10.1063/1.1515108
中图分类号
O59 [应用物理学];
学科分类号
摘要
When two surfaces at two different temperatures are separated by a distance comparable to a mean-free path of the molecules of the ambient medium, the surfaces experience Knudsen force. This mechanical force can be important in microelectromechanical systems and in atomic force microscopy. A theoretical discussion of the magnitude of the forces and the conditions where they can be encountered is discussed. A potential application of the Knudsen force in designing a cantilever-based vacuum gauge is discussed. (C) 2002 American Institute of Physics.
引用
收藏
页码:6326 / 6333
页数:8
相关论文
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