A Novel Failure Response Policy for Single-arm Cluster Tools with Residency Time Constraints

被引：0
|
作者：
Qiao, Yan [1 ]
Wu, NaiQi [2 ]
Pan, ChunRong [3 ]
Zhou, MengChu [3 ]
机构：
[1] Guangdong Univ Technol, Sch Electromech Engn, Guangzhou 510006, Guangdong, Peoples R China
[2] Macau Univ Sci & Technol, Inst Syst Engn, Taipa, Macau, Peoples R China
[3] New Jersey Inst Technol, Dept ECE, Newark, NJ 07102 USA
来源：
2014 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN AND CYBERNETICS (SMC) | 2014年
关键词：
Wafer fabrication; Cluster tools; Petri net; Scheduling; Failure response; SCHEDULING ANALYSIS; MULTICLUSTER TOOLS; EVENT GRAPH; PETRI NETS; SYSTEMS; MODEL;
D O I：
暂无
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
It is very challenging to schedule a residency time-constrained single-arm cluster tool with failure-prone process modules. In some cases, when a failure occurs, the degraded tool is not schedulable. However, it is highly desired to respond to a process module failure properly such that the tool can continue working and the wafers in the tool can be completed in a feasible way. Thus, in this paper, Petri net models are developed to describe the discrete-event behavior of a single-arm cluster tool. With the models, failure response policies are given to control the cluster tool such that it can keep working without violating any residency time constraints. They are implemented via efficient real-time control laws. Illustrative examples are presented to show their usage.
引用
收藏
页码：120 / 126
页数：7
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