The Epilift technique for Si solar cells

被引:27
作者
Weber, KJ [1 ]
Blakers, AW [1 ]
Catchpole, KR [1 ]
机构
[1] Australian Natl Univ, Fac Engn & Informat Technol, Ctr Sustainable Energy Syst, Canberra, ACT 0200, Australia
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1999年 / 69卷 / 02期
关键词
D O I
10.1007/s003390050990
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We present an overview of the Epilift technique, which allows the fabrication of single-crystal silicon films, suitable for photovoltaic purposes. Epitaxial layers are grown by liquid phase epitaxy on partially masked, single-crystal silicon substrates. The layers are detached from the substrate by selective chemical or electrochemical etching, allowing the substrate to be re-used. Epilayers grown on (100) substrates display highly textured surfaces as well as narrow overgrowth widths of the epitaxial layer over the oxide, making them particularly suitable for photovoltaic devices.
引用
收藏
页码:195 / 199
页数:5
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