Active vibration isolation of high-vacuum nanotechnology equipment

被引：1
作者：
Mikhailov, V. P. [1 ]
Bazinenkov, A. M. [1 ]
Kazakov, A., V [1 ]
Rotar', A. P. [1 ]
Ivanova, D. A. [1 ]
机构：
[1] Bauman Moscow State Tech Univ, Moscow 105005, Russia
来源：
26TH INTERNATIONAL CONFERENCE ON VACUUM TECHNIQUE AND TECHNOLOGY | 2019年 / 1313卷
关键词：
D O I：
10.1088/1742-6596/1313/1/012041
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The results of experimental studies of the transients' parameters during the operation of a high-precision drive with a closed-loop control, which at the same time is an active damper, are presented. The amplitude-frequency characteristics of the damper and the vibration-isolating platform in semi-active mode based on four dampers and four elastic suspension assemblies are also shown.
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页数：5
相关论文
共 11 条
  • [1] Expansion of the Suppression Band of a Vibroprotective System by a Feedback Dynamic Damper
    Chernikov, S. A.
    [J]. JOURNAL OF MACHINERY MANUFACTURE AND RELIABILITY, 2015, 44 (05): : 439 - 444
  • [2] Investigation of microvibration levels in a laser interferometer with an active vibration isolation system
    Gruzevich, Yu K.
    Soldatenkov, V. A.
    Achil'diev, V. M.
    Levkovich, A. D.
    Bedro, A. N.
    Komarova, M. N.
    Voronin, I. V.
    [J]. JOURNAL OF OPTICAL TECHNOLOGY, 2018, 85 (05) : 308 - 313
  • [3] Krestnikovskiy K V, 2016, VIBROENGINEERING PRO, V8, P208
  • [4] Dynamic Modeling of an Active Damper
    Mikhailov V.P.
    Bazinenkov A.M.
    Dolinin P.A.
    Stepanov G.V.
    [J]. Russian Engineering Research, 2018, 38 (6) : 434 - 437
  • [5] Research on the Dynamic Characteristics of a Controlled Magnetorheological Elastometer Damper
    Mikhailov, V. P.
    Bazinenkov, A. M.
    Dolinin, P. A.
    Stepanov, G. V.
    [J]. INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2018, 61 (03) : 427 - 432
  • [6] Active vibration isolation platform on base of magnetorheological elastomers
    Mikhailov, Valery P.
    Bazinenkov, Alexey M.
    [J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2017, 431 : 266 - 268
  • [7] Equivalent vibration tests
    Ovchinnikov, Igor
    Brancevich, Peter
    [J]. PROCEEDINGS OF THE 3RD INTERNATIONAL CONFERENCE ON DYNAMICS AND VIBROACOUSTICS OF MACHINES (DVM2016), 2017, 176 : 610 - 617
  • [8] Panovko G, 2016, VIBROENGINEERING PRO, V8, P174
  • [9] Wigglesworth W, 2009, SEMICOND INT, V32, P4
  • [10] Wurzburg B H, 2005, Appl, Patent No. [11/574397, 11574397]
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