Properties of fluorine and tin co-doped ZnO thin films deposited by sol-gel method

被引：65

作者：

Pan, Zhanchang ^{[1
]}

Zhang, Pengwei ^{[1
]}

Tian, Xinlong ^{[1
]}

Cheng, Guo ^{[1
]}

Xie, Yinghao ^{[1
]}

Zhang, Huangchu ^{[2
]}

Zeng, Xiangfu ^{[2
]}

Xiao, Chumin ^{[1
]}

Hu, Guanghui ^{[1
]}

Wei, Zhigang ^{[1
]}

机构：

[1] Guangdong Univ Technol, Sch Chem Engn & Light Ind, Guangzhou 510006, Guangdong, Peoples R China

[2] Victory Giant Technol Hui Zhou Co Ltd, Huizhou 516083, Peoples R China

来源：

JOURNAL OF ALLOYS AND COMPOUNDS | 2013年 / 576卷

基金：

中国国家自然科学基金;

关键词：

F-Sn co-doped ZnO; Various F concentrations; HRTEM; Optical bandgap; Sol-gel processes; OPTICAL-PROPERTIES; ZINC-OXIDE; TRANSPARENT; PHOTOLUMINESCENCE; AL; NANOSTRUCTURES; TEMPERATURE; NANOWIRES; SUBSTRATE; NANORODS;

D O I：

10.1016/j.jallcom.2013.04.132

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Highly transparent and conducting fluorine (F) and tin (Sn) co-doped ZnO (FTZO) thin films were deposited on glass substrates by the sol-gel processing. The structure and morphology of the films are characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and high resolution transmission electron microscopy (HRTEM) with various F doping concentrations. SEM images showed that the hexagonal ZnO crystals were well-arranged on the glass substrates and the HRTEM images indicated that the individual nanocrystals are highly oriented and exhibited a perfect lattice structure. Owing to its high carrier concentration and mobility, as well as good crystal quality, a minimum resistivity of 1 x 10(-3) - Omega cm was obtained from the FTZO thin film with 3% F doping, and the average optical transmittance in the entire visible wavelength region was higher than 90%. The X-ray photoelectron spectroscopy (XPS) study confirmed the substitution of Zn2+ by Sn ions and Room temperature photoluminescence (PL) observed for pure and FTZO thin films suggested the films exhibit a good crystallinity with a very low defect concentration. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：31 / 37

页数：7

共 35 条

[21] Effects of Al and Sn dopants on the structural and optical properties of ZnO thin films [J].

Pan, Zhanchang ;

Tian, Xinlong ;

Wu, Shoukun ;

Xiao, Chumin ;

Li, Zhuliang ;

Deng, Jianfeng ;

Hu, Guanghui ;

Wei, Zhigang .

SUPERLATTICES AND MICROSTRUCTURES, 2013, 54 :107-117

[22] RETRACTED: Investigation of structural, optical and electronic properties in Al-Sn co-doped ZnO thin films (Retracted article. See vol. 469, pg. 1021, 2019) [J].

Pan, Zhanchang ;

Tian, Xinlong ;

Wu, Shoukun ;

Yu, Xia ;

Li, Zhuliang ;

Deng, Jianfeng ;

Xiao, Chumin ;

Hu, Guanghui ;

Wei, Zhigang .

APPLIED SURFACE SCIENCE, 2013, 265 :870-877

[23] Physical properties of transparent and conducting sprayed fluorine doped zinc oxide thin films [J].

Shinde, S. S. ;

Shinde, P. S. ;

Pawar, S. M. ;

Moholkar, A. V. ;

Bhosale, C. H. ;

Rajpure, K. Y. .

SOLID STATE SCIENCES, 2008, 10 (09) :1209-1214

[24] RETRACTED: Preparation and characterization of vertically aligned ZnO microrods on glass substrate (Retracted Article) [J].

Tian, Xinlong ;

Pan, Zhanchang ;

Zhang, Huangchu ;

Xie, Yinghao ;

Zeng, Xiangfu ;

Xiao, Chumin ;

Hu, Guanghui ;

Wei, Zhigang .

MATERIALS LETTERS, 2013, 97 :71-73

[25] Formation of F-doped ZnO transparent conductive films by sputtering of ZnF2 [J].

Tsai, Yu-Zen ;

Wang, Na-Fu ;

Tsai, Chun-Lung .

MATERIALS LETTERS, 2009, 63 (18-19) :1621-1623

[26] Effect of Sn-doped on microstructural and optical properties of ZnO thin films deposited by sol-gel method [J].

Tsay, Chien-Yie ;

Cheng, Hua-Chi ;

Tung, Yen-Ting ;

Tuan, Wei-Hsing ;

Lin, Chung-Kwei .

THIN SOLID FILMS, 2008, 517 (03) :1032-1036

[27] On single doping and co-doping of spray pyrolysed ZnO films: Structural, electrical and optical characterisation [J].

Vimalkumar, T. V. ;

Poornima, N. ;

Jinesh, K. B. ;

Kartha, C. Sudha ;

Vijayakumar, K. P. .

APPLIED SURFACE SCIENCE, 2011, 257 (20) :8334-8340

[28] Fabrication and Characterization of ZnO Nanowire Arrays with an Investigation into Electrochemical Sensing Capabilities [J].

Weber, Jessica ;

Jeedigunta, Sathyaharish ;

Kumar, Ashok .

JOURNAL OF NANOMATERIALS, 2008, 2008

[29] DISLOCATION DENSITIES IN SOME ANNEALED AND COLD-WORKED METALS FROM MEASUREMENTS ON THE X-RAY DEBYE-SCHERRER SPECTRUM [J].

WILLIAMSON, GK ;

SMALLMAN, RE .

PHILOSOPHICAL MAGAZINE, 1956, 1 (01) :34-46

[30] Low-temperature growth and optical properties of Ce-doped ZnO nanorods [J].

Yang, Jinghai ;

Gao, Ming ;

Yang, Lili ;

Zhang, Yongjun ;

Lang, Jihui ;

Wang, Dandan ;

Wang, Yaxin ;

Liu, Huilian ;

Fan, Hougang .

APPLIED SURFACE SCIENCE, 2008, 255 (05) :2646-2650

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