Characterization and Reliability Study of a MEMS Mirror Based on Electrothermal Bimorph Actuation

被引：0

作者：

Wang, Haoran ^{[1
,2
]}

Zhang, Xiaoyang ^{[1
]}

Zhang, Daihua ^{[2
]}

Zhou, Liang ^{[1
]}

Xie, Huikai ^{[1
]}

机构：

[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA

[2] Tianjin Univ, Sch Precis Instruments & Optoelect Engn, Tianjin, Peoples R China

来源：

2017 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2017年

关键词：

MEMS; Micromirror; bimorph; electrothermal actuation; reliability;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An electrothermal bimorph based MEMS mirror with large scan range, high fill factor and high resonant frequency is presented. A reliability issue due to burn-out of a bimorph thermal actuator is also studied and modeled.

引用

页码：141 / 142

页数：2

共 4 条

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[2]

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[3]

Zhang XY, 2015, 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), P912, DOI 10.1109/TRANSDUCERS.2015.7181072

[4] A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph [J].

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MICROMACHINES, 2015, 6 (12) :1876-1889

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