The different structure characteristics of nanosized Co3O4 film crystallized by the annealing and plasma techniques

被引：19

作者：

Chen, G. L. ^{[1
,2
,3
]}

Guyon, C. ^{[3
]}

Zhang, Z. X. ^{[1
,2
]}

Ognier, S. ^{[3
]}

Beem, J. ^{[4
]}

Tatoulian, M. ^{[3
]}

机构：

[1] Zhejiang Sci Tech Univ, Minist Educ, Key Lab Adv Text Mat & Mfg Technol, Hangzhou 310018, Zhejiang, Peoples R China

[2] Zhejiang Sci Tech Univ, Minist Educ, Engn Res Ctr Ecodyeing & Finishing Text, Hangzhou 310018, Zhejiang, Peoples R China

[3] Univ Paris 06, Ecole Natl Super Chim Paris Chim ParisTech, Lab Genie Proc Plasmas & Traitements Surfaces, F-75005 Paris, France

[4] Univ Oklahoma, Sch Chem Biol & Mat Engn, Norman, OK 73019 USA

来源：

MATERIALS LETTERS | 2013年 / 107卷

基金：

中国国家自然科学基金;

关键词：

Plasma enhanced chemical vapor deposition; Nanocrystalline materials; Crystal structure; Functional; XPS; LOW-TEMPERATURE OXIDATION; COBALT OXIDE; METHANE COMBUSTION; CATALYSTS;

D O I：

10.1016/j.matlet.2013.05.071

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this study, we deposited nano-Co3O4 film on silicon substrate using plasma-enhanced metal-organic chemical vapor deposition (PEMOCVD), and the structure difference of Co3O4 crystallized by the annealing and the Ar/O-2 plasma techniques were explored by SEM, TEM, XRD, and XPS. Compared to the net morphology of Co3O4 film treated with high calcinations temperature, the cauliflowers-shaped micro-clusters were changed to nano-catkin when the sample was treated with Ar and O-2 plasma for 40 min. Additionally, both samples (annealed and plasma-treated) showed the formation of both the {311} and {220} planes. The surface richness of active Co3+ sites on the exposed {220} plane indicated that the as-deposited nano-Co3O4 films have potential catalytic properties for CO and hydrocarbon oxidation. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：111 / 114

页数：4

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