Influence of air-induced vibration of aerostatic bearing on the machined surface quality in ultra-precision flycutting

被引：17

作者：

Gao, Qiang ^{[1
]}

Lu, Lihua ^{[1
]}

Chen, Wanqun ^{[1
]}

Wang, Guanglin ^{[1
]}

机构：

[1] Harbin Inst Technol, Sch Mech Engn, POB 413,92 West Dazhi St, Harbin, Heilongjiang, Peoples R China

来源：

PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART J-JOURNAL OF ENGINEERING TRIBOLOGY | 2018年 / 232卷 / 02期

基金：

对外科技合作项目（国际科技项目）; 中国国家自然科学基金;

关键词：

Air-induced vibration; aerostatic bearing; ultra-precision machining; large eddy simulation; surface quality; PRESSURE FLUCTUATION; PERFORMANCE; SIMULATION; SPINDLE; OPTICS;

D O I：

10.1177/1350650117706642

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

The performance of potassium dihydrogen phosphate optics in inertial confinement fusion devices is highly affected by its surface topography. This paper theoretically investigates the relationship between the air-induced vibration of aerostatic bearing and high-frequency ripples (amplitudes of around 12nm, spatial periods in the range of 8-30mm) on machined surface of potassium dihydrogen phosphate optics. A simulation model, which combines transient computational fluid dynamic analysis and transient dynamic analysis, is proposed to simulate the vibration of tool tip. The three-dimensional flow status of air film is studied based on large eddy simulation method, and air vortex shedding phenomenon is observed, which results in the dynamical change of air film force. The simulated vibration amplitudes of tool tip is 8nm, and its spatial periods are in the range of 10-24mm, which agree well with the measured data.

引用

页码：117 / 125

页数：9