Design and manufacturing of high inductance planar coils for small scale sensing applications

被引：6

作者：

Poliakine, J. ^{[1
]}

Civet, Y. ^{[1
]}

Perriard, Y. ^{[1
]}

机构：

[1] EPFL, Integrated Actuators Lab, Rue Maladiere 71B, CH-2002 Neuchatel, Switzerland

来源：

PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016 | 2016年 / 168卷

关键词：

planar coil; inductive sensor; aluminum processing; plasma etching; inductance;

D O I：

10.1016/j.proeng.2016.11.368

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This work addresses the design and fabrication of small scale planar coils with high number of turns (> 100) and self inductances up to 32 mu H suitable for the enhancement of inductive sensors performances. First, the modified Wheeler's formula is used to determine the optimal number of turns in order to achieve the highest inductance. Then, a simple process flow based on inductively coupled plasma (ICP) etching of sputtered aluminum on silicon substrate is presented and the key aspects of the processing are discussed. Finally, the fabricated coils are characterized both electrically and morphologically and the measurements are compared to the model showing good agreement with the theoretical predictions. (C) 2016 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license.

引用

页码：1127 / 1130

页数：4

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