Single-shot multispectral angle-resolved ellipsometry

被引：12
|
作者：
Choi, Garam [1 ]
Lee, Seung Woo [1 ]
Lee, Sin Yong [1 ]
Pahk, Heui Jae [1 ]
机构：
[1] Seoul Natl Univ, Sch Mech & Aerosp Engn, Gwanak Ro 1, Seoul 151742, South Korea
来源：
APPLIED OPTICS | 2020年 / 59卷 / 21期
关键词：
SPECTROSCOPIC ELLIPSOMETRY; THICKNESS MEASUREMENT; IMAGING ELLIPSOMETRY; OPTICAL-CONSTANTS; THIN-FILMS; SILICON;
D O I：
10.1364/AO.396907
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We describe an instantaneous measurement scheme of multispectral angle-resolved ellipsometry with a color camera. A back focal plane image captured by the color camera enables us to simultaneously measure various polarization states along incidence angles and a multispectral domain. Modified parameters based on the principle of micro-ellipsometry are derived for an adequate form in a red, green and blue (RGB) domain by considering the wideband multispectral acquisition. The proposed method is validated by the measurement of uniformly deposited films and comparing our results with a commercial ellipsometer. The comparison shows that our proposed method enables real-time inspection with high precision. (C) 2020 Optical Society of America
引用
收藏
页码：6296 / 6303
页数：8
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