Size-dependence on Load Properties of A Silicon Nanobeam

A semi-continuum approach is developed for mechanical analysis of a silicon nanobeam, which captures the atomistic physics and retains the efficiency of continuum models. Young's modulus of the silicon (001) nanobeam along [100] direction is obtained by the developed semi-continuum approach, which decreases dramatically as the size of a silicon nanobeam width and thickness scaling down. Taking into account the variations of Young's modulus at different size, the load properties of the nanobeam is computed. The model predicts the deflection of the nanobeam is size-dependence.