The micro mechanical environment on the comb capacitive micro-machined gyroscope

被引：0

作者：

Liu, Hai-peng ^{[1
]}

Gao, Shi-qiao ^{[1
]}

Niu, Shaohua ^{[2
]}

Jin, Lei ^{[2
]}

机构：

[1] Beijing Inst Technol, State Key Lab Explos Sci & Technol, Beijing 100081, Peoples R China

[2] Beijing Inst Technol, Sch Elect Mech Engn, Beijing 100081, Peoples R China

来源：

SECOND INTERNATIONAL CONFERENCE ON SMART MATERIALS AND NANOTECHNOLOGY IN ENGINEERING | 2009年 / 7493卷

关键词：

Comb structure; Mechanical environment; Micro forces; Action extent;

D O I：

10.1117/12.839539

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

With the in-depth researches on MEMS sensors, a lot of mechanical problems are encountered inevitably. Especially for the comb capacitive micro-machined gyroscope, a typical MEMS inertia sensor, the speciality of its structure and micro size determines the characteristics of the mechanical environment. With the reduction of structural size, the ratio of surface force and body force has increased clearly. Comparing with the roles of body force, the roles of surface force in MEMS sensors become more and more important. The micro forces, such as electrostatic force, Van de Waals force, capillary force and air-damping force were analyzed, and the action extent of these micro forces were obtained.

引用

页数：6