micro-actuator;
high-bandwidth servo control;
high track pitch;
moving slider;
D O I:
10.1109/20.800626
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
This paper describes a micro-actuator for high-bandwidth tracking servo, where a microactuator is attached between slider and suspension, and moves the slider relative to the suspension, The micro-actuator frequency response measurement proved that this micro-actuator can be modeled as an ideal spring-mass-damper system up to 80 kHz, so that very high bandwidth servo System can be easily designed. The maximum servo bandwidth of 6.4 kHz; was achieved in a drive level experiment, which is the highest bandwidth ever demonstrated as a drive level. A rapid step response time of 0.2 mS for 0.6 mu m step was also achieved. The experimental bandwidth was not limited by the micro-actuator's resonance mode, but the saturation of the micro-actuator driver.