Self-organized formation of short TiO2 nanotube arrays by complete anodization of Ti thin films

被引：5
|
作者：
Okada, Masahisa [1 ]
Tajima, Kazuki [1 ]
Yamada, Yasusei [1 ]
Yoshimura, Kazuki [1 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Mat Res Inst Sustainable Dev, Moriyama Ku, Nagoya, Aichi 4638560, Japan
来源：
18TH INTERNATIONAL VACUUM CONGRESS (IVC-18) | 2012年 / 32卷
关键词：
Titanium dioxide; Nanotubes; Anodization; Self-organization; Thin films; Crystallization;
D O I：
10.1016/j.phpro.2012.03.622
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We investigate the self-organized growth of short TiO2 nanotubes by complete anodization of Ti thin films deposited on Si substrates in ethylene glycol electrolytes with small addition of NH4F. During the anodization process, real-time inspection of the current transient is performed to anodize the Ti films completely. X-ray photoelectron spectroscopy and scanning electron microscopy are employed to characterize the resulting samples. We find that the length of the formed TiO2 nanotubes is governed by the thickness of Ti thin films independently of the tube diameter. Short TiO2 nanotubes are also found to be stable up to 550 degrees C in air atmosphere even after crystallization to rutile. (C) 2012 Published by Elsevier B. V. Selection and/or peer review under responsibility of Chinese Vacuum Society (CVS).
引用
收藏
页码：714 / 718
页数：5
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