Self-mending of microcracks in barium titanate glass-ceramic thin films with high dielectric constant

BaTiO3 glass-ceramic thin films were deposited on silicon substrates by the sot-gel method. The films exhibited a mixed structure of glass phase and BaTiO3 grains tens of nanometers in diameter, and had a high dielectric constant, low leakage current, and dielectric loss. An interesting self-mending phenomenon for microcracks due to the fluidity of the glass phase during the annealing process was observed in the films. The effects of the existence of the self-mended microcracks on electrical properties were evaluated. Our experimental results indicate the potential value of BaTiO3 glass-ceramic thin films for integrated high-dielectric-constant media.