Large Suspended Monolayer and Bilayer Graphene Membranes with Diameter up to 750 μm

被引：34

作者：

Akbari, Shirin Afyouni ^{[1
,2
]}

Ghafarinia, Vahid ^{[1
]}

Larsen, Tom ^{[2
]}

Parmar, Marsha M. ^{[2
]}

Villanueva, Luis Guillermo ^{[2
]}

机构：

[1] Isfahan Univ Technol IUT, Esfahan, Iran

[2] Ecole Polytech Fed Lausanne EPFL, Adv NEMS Lab, Lausanne, Switzerland

来源：

SCIENTIFIC REPORTS | 2020年 / 10卷 / 01期

基金：

瑞士国家科学基金会;

关键词：

GRAIN-BOUNDARIES; TRANSPORT;

D O I：

10.1038/s41598-020-63562-y

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

In this paper ultra clean monolayer and bilayer Chemical Vapor Deposited (CVD) graphene membranes with diameters up to 500 mu m and 750 mu m, respectively have been fabricated using Inverted Floating Method (IFM) followed by thermal annealing in vacuum. The yield decreases with size but we show the importance of choosing a good graphene raw material. Dynamic mechanical properties of the membranes at room temperature in different diameters are measured before and after annealing. The quality factor ranges from 200 to 2000 and shows no clear dependence on the size. The resonance frequency is inversely proportional to the diameter of the membranes. We observe a reduction of the effective intrinsic stress in the graphene, as well as of the relative error in the determination of said stress after thermal annealing. These measurements show that it is possible to produce graphene membranes with reproducible and excellent mechanical properties.

引用

页数：8

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