High quality single-walled carbon nanotube synthesis using remote plasma CVD

被引：15

作者：

Ohashi, Toshiyuki ^{[1
]}

Kato, Ryogo ^{[2
]}

Ochiai, Takumi ^{[2
]}

Tokune, Toshio ^{[1
]}

Kawarada, Hiroshi ^{[2
]}

机构：

[1] Honda Res & Dev Co Ltd, Fundamental Technol Res Ctr, Wako, Saitama 3510193, Japan

[2] Waseda Univ, Dept Nanosci & Nanoengn, Shinjuku Ku, Tokyo 169855, Japan

来源：

关键词：

Single-walled carbon nanotubes; Chemical vapor deposition (CVD); Remote plasma CVD; Carbon monoxide; Cobalt catalyst; Ion bombardment; GROWTH;

D O I：

10.1016/j.diamond.2012.01.014

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Single-walled carbon nanotube (SWNT) forest synthesis using antenna-type remote plasma chemical vapor deposition (ARPCVD) is presented. A series of synthesis using carbon monoxide gas as carbon feedstock reveals that the remote conditions, in other words, distance between an antenna and a substrate affects the quality of nanotube significantly. That is, far distance geometry on ARPCVD creates high-quality SWNTs. It motivates us to use same methodology for the synthesis using CH4/H-2 previously proven to make long SWNT forests. Finally, along the methodology, we achieve to make SWNT forest with high-quality and small diameter successfully. This study offers an important suggestion to embody SWNT forests with both length and quality using remote plasma CVD. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：184 / 187

页数：4

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