Numerical Modelling of Electrical Behaviour of Semiconductor-Based Micro-Sensors for Copper Ions Detection

被引:3
作者
Chermiti, J. [1 ,2 ]
Ben Ali, M. [1 ,3 ]
Jaffrezic-Renault, N. [4 ]
机构
[1] Univ Tunis Carthage, Unite Rech Phys Semicond, IPEST, Tunis 2070, Tunisia
[2] Univ Sousse, Inst Super Sci Appl & Technol Sousse Cite Etttafe, Sousse 4003, Tunisia
[3] Univ Tunis Carthage, Inst Preparatoire Etud Ingenieur Nabeul Mrezgua N, Tunis 8000, Tunisia
[4] Univ Lyon 1, Lab Analyt Sci, F-69622 Villeurbanne, France
关键词
Ion Sensitive Sensors; EIS and ISFET Structures; Cu2+; Thiacalix-4-Arene; Site Binding Model; SPICE Model; THIN-FILMS; ZNO FILMS; ISFET;
D O I
10.1166/sl.2011.1757
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The design and investigation of electronic micro systems oriented towards environmental and biological monitoring, requires more accurate PC-based simulation tools to predict and model properly the sensor characteristics. This paper describes a user-friendly platform allowing prediction of behaviors of chemical sensors based on semiconductor technology (EIS structure and ISFET) in order to optimize the geometry of micro-sensors. In addition, it enables the extraction of both microscopic and macroscopic parameters which define the sensor recognition properties.
引用
收藏
页码:2339 / 2342
页数:4
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