Development of RF-MEMS ohmic contact switch for mobile handsets applications

被引：0
|
作者：
Fujiwara, Takeshi [1 ]
Seki, Tomonori [1 ]
Sato, Fumihiko [1 ]
Oba, Masatoshi [1 ]
机构：
[1] OMRON Corp, PMEMS Project, Yasu, Shiga, Japan
来源：
2012 42ND EUROPEAN MICROWAVE CONFERENCE (EUMC) | 2012年
关键词：
Electrostatic Actuator; Charge pumps; Linearity;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Here, we propose a practical single pole double throw (SPDT)-structured RF-MEMS switch for mobile handsets applications. This RF-MEMS switch has a very low insertion loss of 0.18dB and a high isolation of 32dB, up to 3GHz. And this RF-MEMS switch achieves small size by using through silicon via (TSV) structure (2.5x1.6x0.4mm3). Moreover, in the last of this paper, we show the feasibility of 3 voltage drive by integrating a charge pump IC, since a low-voltage drive is indispensable for mobile handsets applications.
引用
收藏
页码：180 / 183
页数：4
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