Heteroepitaxial growth of alpha-Fe2O3 thin films on (111)GGG

被引:7
作者
Gomi, M
Toyoshima, W
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1996年 / 35卷 / 5A期
关键词
alpha-Fe2O3; garnet; epitaxial growth; heteroepitaxy; MMIC; Ba ferrite;
D O I
10.1143/JJAP.35.L544
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thin films of alpha-Fe2O3 have been prepared on gadolinium gallium garnet (GGG) (111) substrates by rf sputtering and subsequent heat treatment. The films deposited below 180 degrees C and annealed at 900 degrees C were found to exhibit a strong [0006] texture perpendicular to the film plane. X-ray pole figure analysis showed that a nearly single-crystalline film of (0001) alpha-Fe2O3 was grown on (111) GGG with an in-plane alignment of alpha-Fe2O3 [2<(11)over bar>0] parallel to GGG [1 (1) over bar 0]. Thus, the alpha-Fe2O3 films with the corundum crystal structure may be a promising buffer layer for achieving heteroepitaxy of various ferrite thin films onto a common substrate of GGG.
引用
收藏
页码:L544 / L546
页数:3
相关论文
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