Millimeter-wave phase shifter based on waveguide-mounted RF-MEMS

被引：11

作者：

Psychogiou, Dimitra ^{[1
]}

Li, Yunjia ^{[2
]}

Hesselbarth, Jan ^{[3
]}

Kuehne, Stephane ^{[2
]}

Peroulis, Dimitrios ^{[4
]}

Hierold, Christofer ^{[2
]}

Hafner, Christian ^{[1
]}

机构：

[1] ETH, Lab Electromagnet Fields & Microwave Elect, Dept Informat Technol & Elect Engn, CH-8092 Zurich, Switzerland

[2] ETH, Grp Micro & Nanosyst, Dept Mech & Proc Engn, CH-8092 Zurich, Switzerland

[3] Univ Stuttgart, Inst Radio Frequency Technol, D-70569 Stuttgart, Germany

[4] Purdue Univ, Sch Elect & Comp Engn, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA

来源：

MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 2013年 / 55卷 / 03期

基金：

瑞士国家科学基金会; 美国国家科学基金会;

关键词：

phase shifter; RF-MEMS; resonator; analog tuning;

D O I：

10.1002/mop.27390

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A continuously variable transmission type W-band phase shifter based on a single pole bandpass filter tuned by MEMS actuated fingers is reported. Tuning is achieved by means of two half-wavelength long conductive fingers that synchronously rotate upwards in an antiparallel fashion. The fingers deflection results in a distributed variable shunt capacitance which in turn leads to a variable analog phase shift. For an applied DC bias voltage between 0 and 26 V, the transmission phase can be continuously varied up to 46.4 degrees at a frequency of 106 GHz with an insertion loss of less than 3.4 dB. (C) 2012 Wiley Periodicals, Inc. Microwave Opt Technol Lett 54:465468, 2013; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.27390

引用

页码：465 / 468

页数：4

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