Sputtering and reflection under cluster bombardment of solids

被引：6

作者：

Anders, Christian

Urbassek, Herbert M. ^{[1
]}

机构：

[1] Univ Kaiserslautern, Dept Phys, D-67663 Kaiserslautern, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2013年 / 315卷

关键词：

Molecular-dynamics simulation; Cluster impact; Sputtering; Reflection; MOLECULAR-DYNAMICS; ENERGY; IMPACT; SURFACES; CRATERS;

D O I：

10.1016/j.nimb.2013.04.076

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Using molecular-dynamics simulation, we study the sputtering induced by energetic impacts of projectile clusters containing N = 100 and 1000 atoms. Both a metallic target and a van-der-Waals-bonded material are studied. We focus on self-bombardment at perpendicular incidence. The total emission yield is composed of the sputter yield of the target material and the reflection yield of reflected projectile cluster atoms. The dependence of these yields on the impact energy shows a slow transition from reflection- to sputter-dominated emission. Similarities and differences between the emission yield of metals and of van-der-Waals-bonded materials are discussed. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：304 / 307

页数：4

共 30 条

[1] Molecular-dynamics study of craters formed by energetic Cu cluster impact on Cu [J].

Aderjan, R ;

Urbassek, HM .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2000, 164 :697-704

[2] Effect of binding energy and mass in cluster-induced sputtering of van-der-Waals bonded systems [J].

Anders, C ;

Urbassek, HM .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 228 :84-91

[3] Linearity and additivity in cluster-induced sputtering: A molecular-dynamics study of van der Waals bonded systems [J].

Anders, C ;

Urbassek, HM ;

Johnson, RE .

PHYSICAL REVIEW B, 2004, 70 (15) :155404-1

[4] Crater formation by nanoparticle impact: contributions of gas, melt and plastic flow [J].

Anders, Christian ;

Ziegenhain, Gerolf ;

Ruestes, Carlos J. ;

Bringa, Eduardo M. ;

Urbassek, Herbert M. .

NEW JOURNAL OF PHYSICS, 2012, 14

[5] Crater formation caused by nanoparticle impact: A molecular dynamics study of crater volume and shape [J].

Anders, Christian ;

Bringa, Eduardo M. ;

Fioretti, Fabricio D. ;

Ziegenhain, Gerolf ;

Urbassek, Herbert M. .

PHYSICAL REVIEW B, 2012, 85 (23)

[6] Why Nanoprojectiles Work Differently than Macroimpactors: The Role of Plastic Flow [J].

Anders, Christian ;

Bringa, Eduardo M. ;

Ziegenhain, Gerolf ;

Graham, Giles A. ;

Hansen, J. Freddy ;

Park, Nigel ;

Teslich, Nick E. ;

Urbassek, Herbert M. .

PHYSICAL REVIEW LETTERS, 2012, 108 (02)

[7] Stopping of hypervelocity clusters in solids [J].

Anders, Christian ;

Bringa, Eduardo M. ;

Ziegenhain, Gerolf ;

Urbassek, Herbert M. .

NEW JOURNAL OF PHYSICS, 2011, 13

[8]

[Anonymous], 1990, Energetic Charged-Particle Interactions with Atmospheres and Surfaces

[9] Study of crater formation and sputtering process with large gas cluster impact by molecular dynamics simulations [J].

Aoki, Takaaki ;

Seki, Toshio ;

Ninomiya, Satoshi ;

Ichiki, Kazuya ;

Matsuo, Jiro .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2009, 267 (8-9) :1424-1427

[10] Cratering-energy regimes: From linear collision cascades to heat spikes to macroscopic impacts [J].

Bringa, EM ;

Nordlund, K ;

Keinonen, J .

PHYSICAL REVIEW B, 2001, 64 (23)

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