Fabrication of flexible microlens array film using roll-to-roll process

被引:8
作者
Wang, Min-Wen [1 ]
Lin, Wei-Chuang [1 ]
Lee, Ming-Hsiao [2 ]
机构
[1] Natl Kaohsiung Univ Appl Sci, Dept Mech Engn, Kaohsiung 807, Taiwan
[2] Natl Ctr High Performance Comp, Appl Computat Engn Div, Hsinchu, Taiwan
关键词
Roll-to-roll; microfabrication; ultraviolet resin; microlens array; LENS; LITHOGRAPHY; PATTERN; DESIGN; IMPACT; MOLD; SIZE;
D O I
10.1177/0954405413475940
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Microlens arrays are a vital part of today's optical systems, and advances in fabrication technology have broadened microlens array applications. The roll-to-roll fabrication process has an advantage in its fast and mass replication of microstructures, and it is a good fit for fabricating devices based on flexible substrates. To investigate the roll-to-roll process in the making of microlens arrays of different radii in the same process, this study designs microlens arrays with radii ranging from 55 to 240 mu m and with a height of 15 mu m. The material for the lens is an ultraviolet curable resin with a refractive index of 1.5. The lens pattern is first transferred to an 80-mu m-thick stainless steel sheet through an etching process. The patterned sheet is then wrapped around a stainless steel roller for roll-to-roll fabrication of the microlens array film. The substrate for the microlens array is a polyethylene terephthalate film 188 mu m in thickness. When operating with a substrate forward speed of 0.251 m/min (1 r/min) and imprinting pressure of 0.6 MPa, the replication rates achieved for both the radius and the height of the microlens arrays are about 97%. Single-peak filling patterns are found with the small radii lenses, while dual-peak patterns are found in lenses with bigger radii. Overall, this study demonstrates the potential of roll-to-roll in three-dimensional pattern fabrications and its application in microlens array optical film fabrication.
引用
收藏
页码:543 / 550
页数:8
相关论文
共 32 条
[1]  
Ahn SH, 2009, P SPIE
[2]   Design and fabrication of micro optical film by ultraviolet roll imprinting [J].
Ahn, Suho ;
Choi, Minseok ;
Bae, Hyungdae ;
Lim, Jiseok ;
Myung, Ho ;
Kim, Hongmin ;
Kang, Shinill .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (8B) :5478-5484
[3]   Refractive microlens fabrication by ink-jet process [J].
Biehl, S ;
Danzebrink, R ;
Oliveira, P ;
Aegerter, MA .
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1998, 13 (1-3) :177-182
[4]   Fabrication of plastic microlens array using gas-assisted micro-hot-embossing with a silicon mold [J].
Chang, C. -Y. ;
Yang, S. -Y. ;
Huang, L. -S. ;
Chang, J. -H. .
INFRARED PHYSICS & TECHNOLOGY, 2006, 48 (02) :163-173
[5]   A novel method for rapid fabrication of microlens arrays using micro-transfer molding with soft mold [J].
Chang, Chih-Yuan ;
Yang, Sen-Yeu ;
Huang, Long-Sun ;
Jeng, Tian-Ming .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 16 (05) :999-1005
[6]   Novel hydrostatic pressuring mechanism for soft UV-imprinting processes [J].
Cheng, Fang-Sung ;
Yang, Sen-Yeu ;
Chen, Chien-Chang .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 26 (01) :132-136
[7]   THE MANUFACTURE OF MICROLENSES BY MELTING PHOTORESIST [J].
DALY, D ;
STEVENS, RF ;
HUTLEY, MC ;
DAVIES, N .
MEASUREMENT SCIENCE AND TECHNOLOGY, 1990, 1 (08) :759-766
[8]  
Eun-Hyun Park, 1999, 1999 IEEE LEOS Annual Meeting Conference Proceedings. LEOS'99. 12th Annual Meeting. IEEE Lasers and Electro-Optics Society 1999 Annual Meeting (Cat. No.99CH37009), P639, DOI 10.1109/LEOS.1999.811890
[9]   Simple reflow technique for fabrication of a microlens array in solgel glass [J].
He, M ;
Yuan, XC ;
Ngo, NQ ;
Bu, J ;
Kudryashov, V .
OPTICS LETTERS, 2003, 28 (09) :731-733
[10]   Analysis and fabrication of minifeature lamp lens by excimer laser micromachining [J].
Hocheng, Hong ;
Wang, Kuan-Yu .
APPLIED OPTICS, 2007, 46 (29) :7184-7189