Method for reducing debris and thermal destruction in femtosecond laser processing by applying transparent coating

被引：19

作者：

Kawamura, D ^{[1
]}

Takita, A ^{[1
]}

Hayasaki, Y ^{[1
]}

Nishida, N ^{[1
]}

机构：

[1] Univ Tokushima, Fac Engn, Dept Opt Sci & Technol, Tokushima 7708506, Japan

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2006年 / 82卷 / 03期

关键词：

D O I：

10.1007/s00339-005-3422-y

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A cavity processed by a tightly focused femtosecond laser pulse is surrounded by a ring-shaped protrusion, debris, and small droplets. In order to reduce these undesired damages, we propose processing with a coating of transparent material on a target material. PMMA (poly-methyl methacrylate) with the thickness that its surface is not ablated by a single pulse irradiation reduces dissolution and vaporization caused by the interaction between a high-density hot vapor plume and the target material. Furthermore, the material at the target surface does not escape freely due to the coating layer. As a result, a submicrometer-sized cavity is produced with a reduction of debris and a smaller thermal-destruction area.

引用

页码：523 / 527

页数：5

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