Knudsen type vacuum evaporation source

被引:2
作者
Chaudhary, KL
机构
[1] Def. Inst. of Physiol. and All. Sci.
关键词
D O I
10.14429/dsj.46.4046
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Various types of resistively-heated evaporation sources are used for the vacuum deposition of materials in thin film form. However, the life of such boats or crucibles is short. This paper describes a versatile crucible for Knudsen type effusion process of evaporation for the preparation of thin films of sublimating materials, which have high vapour pressures at temperatures below 1000 degrees C. One representative micrograph of a thin film of CdSe obtained by vacuum evaporation from this crucible is also reported.
引用
收藏
页码:27 / 30
页数:4
相关论文
共 9 条
[1]   CRYSTALLIZATION OF AMORPHOUS ANTIMONY FILMS PREPARED BY VACUUM EVAPORATION [J].
BAHADUR, K ;
CHAUDHAR.KL .
APPLIED PHYSICS LETTERS, 1969, 15 (09) :277-&
[2]  
BAHADUR K, 1968, P 4 EUR REG C EL MIC, P405
[3]  
CHAUDHARY KL, 1988, P 18 ANN C EL MICR S
[4]  
CHAUDHARY KL, 1975, THESIS U DELHI DELHI
[5]  
CHOPRA KL, 1969, THIN FILM PHENOMENA, P15
[6]  
DRUMHELLER CE, 1960, T 7 AVS S NEW YORK, P306
[7]  
DUBEY GC, 1976, THESIS U DELHI DELHI
[8]  
HOLAND L, 1956, VACUUM DEPOSITION TH, P108
[9]  
Knudsen M, 1909, ANN PHYS-BERLIN, V29, P179