Theoretical study of pulsed microwave discharge in nitrogen

被引:14
作者
Bonaventura, Z [1 ]
Trunec, D [1 ]
Mesko, M [1 ]
Vasina, P [1 ]
Kudrle, V [1 ]
机构
[1] Masaryk Univ, Fac Sci, Dept Phys Elect, Brno 61137, Czech Republic
关键词
D O I
10.1088/0963-0252/14/4/014
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
A pulsed microwave discharge burning in pure nitrogen was studied theoretically. The time-dependent Boltzmann equation for electrons was solved numerically in multi-term approximation. It was assumed that the discharge was ignited by a 100kW microwave (f = 9.4GHz) pulses with 2.5 mu s duration; the repetition frequency was 400 Hz. It was shown that the electron distribution function approaches very quickly the steady state distribution function after a change of the amplitude of electric field intensity. The steady state time averaged values of electron mean energy, C diffusion and rate coefficients and drift velocity were calculated for different values of electric field intensity. With these values the actual values of electric field intensity from a previous experiment were determined from the measured time dependence of electron concentration. The calculated values were compared with previous experimental results.
引用
收藏
页码:751 / 756
页数:6
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