A two-axis tilt sensor based on optics

被引：27

作者：

Wu, Jih-Huah

Horng, Kuo-Yang

Lin, Shiuan-Leh

Chang, Rong-Sen

机构：

[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu, Taiwan

[2] CSIST, Microelect Devices Lab, Taoyuan, Taiwan

[3] Natl Cent Univ, Inst Opt Sci, Tao Yuan, Taiwan

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2006年 / 17卷 / 04期

关键词：

tilt sensor; level; CMOS image sensor; centroid method;

D O I：

10.1088/0957-0233/17/4/N01

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A two-axis tilt sensor, consisting of two lenses and a CMOS image sensor, based on refractive law, is described here. This two-lens optical system, which has a bowl-shaped lens, is designed in such a way that one can find the tilt information for the total system. Indeed, the relationship between the tilt angle and the position of the light spot on the sensor is easy to observe directly. The reading tilt angle can be estimated with a resolution of better than 4.2 arcsec. This tilt sensor would be suitable for laboratory, civil engineering and industrial applications.

引用

页码：N9 / N12

页数：4

共 7 条

[1] Tilt sensor and servo control system for gravitational wave detection [J].