NANOPHOTONIC LITHOGRAPHY: A VERSATILE TOOL FOR MANUFACTURING FUNCTIONAL THREE-DIMENSIONAL MICRO-/NANO-OBJECTS

被引：0

作者：

Malinauskas, M. ^{[1
]}

Kirsanske, G. ^{[1
]}

Rekstyte, S. ^{[1
]}

Jonavicius, T. ^{[1
]}

Kaziulionyte, E. ^{[1
]}

Jonusauskas, L. ^{[1
]}

Zukauskas, A. ^{[1
]}

Gadonas, R. ^{[1
]}

Piskarskas, A. ^{[1
]}

机构：

[1] Vilnius State Univ, Laser Res Ctr, Dept Quantum Elect, Fac Phys, LT-10223 Vilnius, Lithuania

来源：

LITHUANIAN JOURNAL OF PHYSICS | 2012年 / 52卷 / 04期

关键词：

ultrafast laser; 3D microfabrication; nanotechnology; lithography; photopolymers; photoresists; photonic crystals; optofluidics; 2-PHOTON POLYMERIZATION TECHNIQUE; PHOTONIC CRYSTAL-STRUCTURES; FEMTOSECOND LASER; 3D SCAFFOLDS; FABRICATION; PHOTOPOLYMERIZATION; MICROFABRICATION; MICROSTRUCTURES; RESOLUTION; TEMPLATES;

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

In this paper, an overview of literature supported by original experimental results on direct laser polymerization of three-dimensional micro-/nano-structuring of various photopolymers is presented. Alternative technologies, principles of threshold based direct laser writing in polymers employing ultrafast lasers, issues of optimization of the laser structuring parameters for increasing fabrication resolution and production throughput are presented and discussed. Examples of woodpile templates and nanogratings are shown as well as an opto-fluidic sensor design for usage in lab-on-chip type devices is demonstrated and its performance is characterized. Additionally, a possibility to produce a three-dimensional electric circuit is introduced.

引用

页码：312 / 326

页数：15

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