A nanoelectromechanical systems optical switch driven by optical gradient force

被引:53
作者
Cai, H. [1 ]
Dong, B. [2 ]
Tao, J. F. [2 ]
Ding, L. [1 ]
Tsai, J. M. [1 ]
Lo, G. Q. [1 ]
Liu, A. Q. [1 ,2 ]
Kwong, D. L. [1 ]
机构
[1] ASTAR, Inst Microelect, Singapore 117685, Singapore
[2] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
关键词
HIGH-SPEED; RESONATOR; MEMS;
D O I
10.1063/1.4775674
中图分类号
O59 [应用物理学];
学科分类号
摘要
A nanoelectromechanical systems (NEMS) optical switch driven by optical gradient force is demonstrated. The switch consists of a free-standing ring resonator and two bus waveguides. When the free-standing ring is bended by the optical gradient force, the output transmission signal is tuned from the on-state to the off-state of the switch. The NEMS optical switch shows a switching time of 43.5 ns and a switching contrast of more than 25 dB. With its chip-scale integrability, the optical switch has potential applications in signal processing and high-speed optical communication networks. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4775674]
引用
收藏
页数:4
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