共 20 条
A nanoelectromechanical systems optical switch driven by optical gradient force
被引:53
作者:

Cai, H.
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机构:
ASTAR, Inst Microelect, Singapore 117685, Singapore ASTAR, Inst Microelect, Singapore 117685, Singapore

Dong, B.
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h-index: 0
机构:
Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore ASTAR, Inst Microelect, Singapore 117685, Singapore

Tao, J. F.
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机构:
Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore ASTAR, Inst Microelect, Singapore 117685, Singapore

Ding, L.
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h-index: 0
机构:
ASTAR, Inst Microelect, Singapore 117685, Singapore ASTAR, Inst Microelect, Singapore 117685, Singapore

Tsai, J. M.
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h-index: 0
机构:
ASTAR, Inst Microelect, Singapore 117685, Singapore ASTAR, Inst Microelect, Singapore 117685, Singapore

Lo, G. Q.
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机构:
ASTAR, Inst Microelect, Singapore 117685, Singapore ASTAR, Inst Microelect, Singapore 117685, Singapore

Liu, A. Q.
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机构:
ASTAR, Inst Microelect, Singapore 117685, Singapore
Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore ASTAR, Inst Microelect, Singapore 117685, Singapore

Kwong, D. L.
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ASTAR, Inst Microelect, Singapore 117685, Singapore ASTAR, Inst Microelect, Singapore 117685, Singapore
机构:
[1] ASTAR, Inst Microelect, Singapore 117685, Singapore
[2] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
关键词:
HIGH-SPEED;
RESONATOR;
MEMS;
D O I:
10.1063/1.4775674
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
A nanoelectromechanical systems (NEMS) optical switch driven by optical gradient force is demonstrated. The switch consists of a free-standing ring resonator and two bus waveguides. When the free-standing ring is bended by the optical gradient force, the output transmission signal is tuned from the on-state to the off-state of the switch. The NEMS optical switch shows a switching time of 43.5 ns and a switching contrast of more than 25 dB. With its chip-scale integrability, the optical switch has potential applications in signal processing and high-speed optical communication networks. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4775674]
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