Vacuum arc ion source with compound cathode and beam separation by bending magnet

被引：0

作者：

Savkin, K. P. ^{[1
]}

Oks, E. M. ^{[1
,2
]}

Gushenets, V. I. ^{[1
]}

Frolova, V. P. ^{[1
]}

Nikolaev, A. G. ^{[1
]}

Yushkov, G. Yu. ^{[1
]}

机构：

[1] Inst High Current Elect, Tomsk 634055, Russia

[2] Tomsk State Univ Control Syst & Radioelect, Tomsk 634050, Russia

来源：

2016 27TH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM (ISDEIV), VOL 2 | 2016年

基金：

俄罗斯科学基金会;

关键词：

ALLOY CATHODES; PLASMA; SPECTRA; BORON;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The paper reports on a mass-charge spectrometry study of ion beams extracted from the plasma of a vacuum arc discharge with a compound lanthanum hexaboride cathode. The elemental composition of the ion beams was analyzed using a magnetic separator. The vacuum arc operated in repetitive pulsed mode with a current amplitude of 140 A, full width at the base of similar to 350 mu s, and frequency of 2 Hz. The ion-extracting dc voltage was 20 kV. The absolute currents of B+, B2+, and B3+ ions were several hundred microamperes. The extraction of mono-element B ion beams with a low energy spread from the plasma of a vacuum arc is attractive for use in ion beam boriding technologies.

引用

页数：4

共 15 条

[1] Ion flux from vacuum arc cathode spots in the absence and presence of a magnetic field [J].