Micro- and nanomechanical properties of diamond film with various surface morphologies

被引:23
作者
Bogus, A. [1 ]
Gebeshuber, I. C. [1 ,2 ]
Pauschitz, A. [2 ]
Roy, Manish [2 ]
Haubner, R. [3 ]
机构
[1] Vienna Univ Technol, Inst Allgemeine Phys, A-1040 Vienna, Austria
[2] Austrian Ctr Competence Tribol, A-2700 Wiener Neustadt, Austria
[3] Vienna Univ Technol, Inst Chem Technol & Analyt, A-1040 Vienna, Austria
关键词
Diamond film; Chemical vapour deposition Nanotribology; Morphology;
D O I
10.1016/j.diamond.2008.06.010
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The morphologies of chemical vapour deposited (CVD) diamond films call be changed over a wide range by controlling the process parameters of the deposition. The surface morphologies of the film in turn, govern the micro- and nanomechanical properties of the film. In view of these, diamond films having three different types of morphologies namely coarse ballas, fine ballas and faceted, have been deposited using microwave chemical vapour deposition (MWCVD) technique. The morphology, and nature of bonds of these films are characterised with the help of scanning electron microscopy (SEM) and Raman spectroscopy. Hardness of the films is evaluated using nanoindenter. Force spectroscopy. topographies and lateral force values of these films are estimated by means of atomic force microscopy (AFM). Results indicate that films having fine ballas morphology exhibit the minimum roughness Whereas film with faceted morphology has highest relative hardness. The friction force was found to be minimum with the Film having fine ballas morphology and the friction force was maximum With film having coarse ballas morphology. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:1998 / 2004
页数:7
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