Analysis and minimization of noise effects in phase-shifting interferometry

被引:7
作者
Paez, G [1 ]
Strojnik, M [1 ]
机构
[1] Ctr Invest Opt, Leon 37000, Gto, Mexico
来源
INTERFEROMETRY '99: TECHNIQUES AND TECHNOLOGIES | 1999年 / 3744卷
关键词
fringe analysis; interferometry; optical fabrication; phase measurement; surface measurement - figure; noise; phase shifting interferometry;
D O I
10.1117/12.357727
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We perform the analysis of the impact of noise in the phase-shifting interferometry. The effect of the multiplicative noise is equivalent to the (pixel-variable) modulating intensity error, while the additive noise has the two-fold consequences, equivalent to the (pixel-variable) phase-shift error and the modulating intensity error. We evaluate the relative importance of the errors in the background intensity, the modulating intensity, and the phase-shift on the accuracy of the phase recovery. The phase reconstruction process is more sensitive to the phase displacement error than to the intensity error. Finally, we show that the phase reconstruction process is more sensitive to the additive noise than to the multiplicative noise.
引用
收藏
页码:295 / 305
页数:11
相关论文
共 14 条
[1]   EFFECT OF INTENSITY ERROR CORRELATION ON THE COMPUTED PHASE OF PHASE-SHIFTING INTERFEROMETRY [J].
BROPHY, CP .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1990, 7 (04) :537-541
[2]   DIGITAL WAVEFRONT MEASURING INTERFEROMETER FOR TESTING OPTICAL SURFACES AND LENSES [J].
BRUNING, JH ;
HERRIOTT, DR ;
GALLAGHER, JE ;
ROSENFELD, DP ;
WHITE, AD ;
BRANGACCIO, DJ .
APPLIED OPTICS, 1974, 13 (11) :2693-2703
[3]   ROBUST 2-DIMENSIONAL WEIGHTED AND UNWEIGHTED PHASE UNWRAPPING THAT USES FAST TRANSFORMS AND ITERATIVE METHODS [J].
GHIGLIA, DC ;
ROMERO, LA .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1994, 11 (01) :107-117
[4]   DIGITAL PHASE-SHIFTING INTERFEROMETRY - A SIMPLE ERROR-COMPENSATING PHASE CALCULATION ALGORITHM [J].
HARIHARAN, P ;
OREB, BF ;
EIJU, T .
APPLIED OPTICS, 1987, 26 (13) :2504-2506
[5]   PHASE-SHIFTING FOR NONSINUSOIDAL WAVE-FORMS WITH PHASE-SHIFT ERRORS [J].
HIBINO, K ;
OREB, BF ;
FARRANT, DI ;
LARKIN, KG .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1995, 12 (04) :761-768
[6]   OBLIQUE-INCIDENCE AND OBSERVATION ELECTRONIC SPECKLE-PATTERN INTERFEROMETRY [J].
JOENATHAN, C ;
FRANZE, B ;
TIZIANI, HJ .
APPLIED OPTICS, 1994, 33 (31) :7307-7311
[7]   Phase-extraction analysis of laser-diode phase-shifting interferometry that is insensitive to changes in laser power [J].
Onodera, R ;
Ishii, Y .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1996, 13 (01) :139-146
[8]   Phase-shifted interferometry without phase unwrapping:: reconstruction of a decentered wave front [J].
Páez, G ;
Strojnik, M .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1999, 16 (03) :475-480
[9]   Convergent, recursive phase reconstruction from noisy, modulated intensity patterns by use of synthetic interferograms [J].
Paez, G ;
Strojnik, M .
OPTICS LETTERS, 1998, 23 (06) :406-408
[10]   Fringe analysis and phase reconstruction from modulated intensity patterns [J].
Paez, G ;
Strojnik, M .
OPTICS LETTERS, 1997, 22 (22) :1669-1671