Study of RF Reliability of GaN HEMTs Using Low-Frequency Noise Spectroscopy

被引:17
作者
Rao, Hemant P. [1 ]
Bosman, Gijs [1 ]
机构
[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA
关键词
Device reliability; GaN devices; low-frequency noise (LFN); random telegraph switching (RTS) noise; TRANSISTORS;
D O I
10.1109/TDMR.2011.2173497
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The results of continuous wave short-term RF stress applied at 3 GHz on GaN high electron mobility transistors on silicon substrate are presented. The degradation of the device characteristics for RF overdrive conditions from 3-dB to 8-dB gain saturation is discussed. Output RF power degrades significantly in a short period of time. Both transient and permanent degradation of electronic properties of the device are identified. After high RF gain compression levels, DC characteristics like the threshold voltage (V-T) and gate leakage current change permanently. Detailed microscopic changes in the electronic structure of the device were studied by performing simultaneous low-frequency noise measurements of gate and drain currents before and after stress. The channel was found to be immune to the whole stress regime with no increase of the Hooge parameter. On the other hand, activation of unstable defects and then an increase of the defect density near the gate metal semiconductor interface were observed from gate noise measurements. A point defect located at around 4.5 nm from the gate metal semiconductor interface with activation energy of 0.9 eV below the AlGaN conduction band edge was determined from random telegraph noise measurements. The role of forward gate biasing as a failure mechanism is also discussed.
引用
收藏
页码:31 / 36
页数:6
相关论文
共 21 条
[1]   Extraction of oxide trap properties using temperature dependence of random telegraph signals in submicron metal-oxide-semiconductor field-effect transistors [J].
Amarasinghe, NV ;
Çelik-Butler, Z ;
Keshavarz, A .
JOURNAL OF APPLIED PHYSICS, 2001, 89 (10) :5526-5532
[2]  
[Anonymous], IEDM
[3]   Assessment of stress contributions in GaN high electron mobility transistors of differing substrates using Raman spectroscopy [J].
Beechem, Thomas ;
Christensen, Adam ;
Green, D. S. ;
Graham, Samuel .
JOURNAL OF APPLIED PHYSICS, 2009, 106 (11)
[4]   nextnano: General purpose 3-D simulations [J].
Birner, Stefan ;
Zibold, Tobias ;
Andlauer, Till ;
Kubis, Tillmann ;
Sabathil, Matthias ;
Trellakis, Alex ;
Vogl, Peter .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2007, 54 (09) :2137-2142
[5]   Reliability physics of compound semiconductor transistors for microwave applications [J].
Borgarino, M ;
Menozzi, R ;
Dieci, D ;
Cattani, L ;
Fantini, F .
MICROELECTRONICS RELIABILITY, 2001, 41 (01) :21-30
[6]   AlGaN/GaN HEMT With 300-GHz fmax [J].
Chung, Jinwook W. ;
Hoke, William E. ;
Chumbes, Eduardo M. ;
Palacios, Tomas .
IEEE ELECTRON DEVICE LETTERS, 2010, 31 (03) :195-197
[7]   Accelerated RF life testing of GaNHFETs [J].
Conway, A. M. ;
Chen, M. ;
Hashimoto, P. ;
Willadsen, P. J. ;
Micovic, M. .
2007 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 45TH ANNUAL, 2007, :472-+
[8]  
HASEGAWA H, 1993, IEEE MTT-S, P289, DOI 10.1109/MWSYM.1993.276821
[9]   NOISE AS A DIAGNOSTIC AND PREDICTION TOOL IN RELIABILITY PHYSICS [J].
JEVTIC, MM .
MICROELECTRONICS RELIABILITY, 1995, 35 (03) :455-477
[10]   Mechanism of the reverse gate leakage in AlGaN/GaN high electron mobility transistors [J].
Karmalkar, S ;
Sathaiya, DM ;
Shur, MS .
APPLIED PHYSICS LETTERS, 2003, 82 (22) :3976-3978