Carbon nanotubes based vacuum gauge

被引：5
|
作者：
Rudyk, N. N. [1 ]
Il'in, O. I. [1 ]
Il'ina, M. V. [1 ]
Fedotov, A. A. [1 ]
Klimin, V. S. [1 ]
Ageev, O. A. [1 ]
机构：
[1] Southern Fed Univ, Inst Nanotechnol Elect & Equipment Engn, 2 Schevchenko St, Taganrog, Russia
来源：
4TH INTERNATIONAL SCHOOL AND CONFERENCE ON OPTOELECTRONICS, PHOTONICS, ENGINEERING AND NANOSTRUCTURES (SAINT PETERSBURG OPEN 2017) | 2017年 / 917卷
基金：
俄罗斯基础研究基金会;
关键词：
PRESSURE SENSOR; TEMPERATURE; MINIATURE;
D O I：
10.1088/1742-6596/917/8/082008
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We have created an ionization type Vacuum gauge with sensor element based on an array of vertically aligned carbon nanotubes. Obtained asymmetrical current-voltage characteristics at different voltage polarity on the electrode with the CNTs. It was found that when applying a negative potential on an electrode with the CNTs, the current in the gap is higher than at a positive potential. In the pressure range of 1 divided by 10(3) Torr vacuum gauge sensitivity was 6 mV/Torr (at a current of 4.5.10(-5) A) and in the range of 10(-5) divided by 1 Torr was 10 mV/Torr (at a current of 1.3.10(-5) A). It is shown that the energy efficiency of vacuum gauge can be increased in the case where electrode with CNT operates as an emitter of electrons.
引用
收藏
页数：5
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