Carbon nanotubes based vacuum gauge

被引：5
|
作者：
Rudyk, N. N. [1 ]
Il'in, O. I. [1 ]
Il'ina, M. V. [1 ]
Fedotov, A. A. [1 ]
Klimin, V. S. [1 ]
Ageev, O. A. [1 ]
机构：
[1] Southern Fed Univ, Inst Nanotechnol Elect & Equipment Engn, 2 Schevchenko St, Taganrog, Russia
来源：
4TH INTERNATIONAL SCHOOL AND CONFERENCE ON OPTOELECTRONICS, PHOTONICS, ENGINEERING AND NANOSTRUCTURES (SAINT PETERSBURG OPEN 2017) | 2017年 / 917卷
基金：
俄罗斯基础研究基金会;
关键词：
PRESSURE SENSOR; TEMPERATURE; MINIATURE;
D O I：
10.1088/1742-6596/917/8/082008
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We have created an ionization type Vacuum gauge with sensor element based on an array of vertically aligned carbon nanotubes. Obtained asymmetrical current-voltage characteristics at different voltage polarity on the electrode with the CNTs. It was found that when applying a negative potential on an electrode with the CNTs, the current in the gap is higher than at a positive potential. In the pressure range of 1 divided by 10(3) Torr vacuum gauge sensitivity was 6 mV/Torr (at a current of 4.5.10(-5) A) and in the range of 10(-5) divided by 1 Torr was 10 mV/Torr (at a current of 1.3.10(-5) A). It is shown that the energy efficiency of vacuum gauge can be increased in the case where electrode with CNT operates as an emitter of electrons.
引用
收藏
页数：5
相关论文
共 50 条
  • [21] Scattering properties of carbon nanotubes
    Chiariello, Andrea G.
    Forestiere, Carlo
    Miano, Giovanni
    Maffucci, Antonio
    COMPEL-THE INTERNATIONAL JOURNAL FOR COMPUTATION AND MATHEMATICS IN ELECTRICAL AND ELECTRONIC ENGINEERING, 2013, 32 (06) : 1793 - 1808
  • [22] Methods for the chemical synthesis of carbon nanotubes: an approach based on hemispherical polyarene templates
    Scott, Lawrence T.
    PURE AND APPLIED CHEMISTRY, 2017, 89 (06) : 809 - 820
  • [23] Role of Hydrogen in Catalyst Activation for Plasma-Based Synthesis of Carbon Nanotubes
    Tsuji, Takashi
    Kim, Jaeho
    Sakakita, Hajime
    Shimizu, Yoshiki
    Chen, Guohai
    Hata, Kenji
    Futaba, Don N.
    Sakurai, Shunsuke
    ACS OMEGA, 2021, 6 (29): : 18763 - 18769
  • [24] A flexible capacitive sensor based on the electrospun PVDF nanofiber membrane with carbon nanotubes
    Yang, Xiaofeng
    Wang, Yishou
    Qing, Xinlin
    SENSORS AND ACTUATORS A-PHYSICAL, 2019, 299
  • [25] Shear History Effect on the Viscosity of Carbon Nanotubes Water-based Nanofluid
    Estelle, Patrice
    Halelfadl, Salma
    Doner, Nimeti
    Mare, Thierry
    CURRENT NANOSCIENCE, 2013, 9 (02) : 225 - 230
  • [26] Viscosity of carbon nanotubes water-based nanofluids: Influence of concentration and temperature
    Halelfadl, Salma
    Estelle, Patrice
    Aladag, Bahadir
    Doner, Nimeti
    Mare, Thierry
    INTERNATIONAL JOURNAL OF THERMAL SCIENCES, 2013, 71 : 111 - 117
  • [27] Micro- reactors for testing sensor devices based on suspended carbon nanotubes
    Savu, R.
    Silveira, J. V.
    Flacker, A.
    Vaz, A. R.
    Joanni, E.
    Gobbi, A. L.
    Rotondaro, A. L. P.
    Moshkalev, S. A.
    MICROELECTRONICS TECHNOLOGY AND DEVICES - SBMICRO 2012, 2012, 49 (01): : 191 - 197
  • [28] Ionization gauge by carbon nanotube field emission
    In-Mook Choi
    Sam-Yong Woo
    Boo-Shik Kim
    Journal of Mechanical Science and Technology, 2005, 19 : 2127 - 2132
  • [29] Ionization gauge by carbon nanotube field emission
    Choi, IM
    Woo, SY
    Kim, BS
    JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 2005, 19 (11) : 2127 - 2132
  • [30] Differential MEMS capacitance diaphragm vacuum gauge with high sensitivity and wide range
    Han, Xiaodong
    Li, Gang
    Xu, Mahui
    Ke, Xin
    Chen, Huiying
    Feng, Yongjian
    Yan, Huangping
    Li, Detian
    VACUUM, 2021, 191
12345