Carbon nanotubes based vacuum gauge

被引：5
|
作者：
Rudyk, N. N. [1 ]
Il'in, O. I. [1 ]
Il'ina, M. V. [1 ]
Fedotov, A. A. [1 ]
Klimin, V. S. [1 ]
Ageev, O. A. [1 ]
机构：
[1] Southern Fed Univ, Inst Nanotechnol Elect & Equipment Engn, 2 Schevchenko St, Taganrog, Russia
来源：
4TH INTERNATIONAL SCHOOL AND CONFERENCE ON OPTOELECTRONICS, PHOTONICS, ENGINEERING AND NANOSTRUCTURES (SAINT PETERSBURG OPEN 2017) | 2017年 / 917卷
基金：
俄罗斯基础研究基金会;
关键词：
PRESSURE SENSOR; TEMPERATURE; MINIATURE;
D O I：
10.1088/1742-6596/917/8/082008
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We have created an ionization type Vacuum gauge with sensor element based on an array of vertically aligned carbon nanotubes. Obtained asymmetrical current-voltage characteristics at different voltage polarity on the electrode with the CNTs. It was found that when applying a negative potential on an electrode with the CNTs, the current in the gap is higher than at a positive potential. In the pressure range of 1 divided by 10(3) Torr vacuum gauge sensitivity was 6 mV/Torr (at a current of 4.5.10(-5) A) and in the range of 10(-5) divided by 1 Torr was 10 mV/Torr (at a current of 1.3.10(-5) A). It is shown that the energy efficiency of vacuum gauge can be increased in the case where electrode with CNT operates as an emitter of electrons.
引用
收藏
页数：5
相关论文
共 50 条
  • [1] Vacuum gauges with emitters based on carbon nanotubes
    Kim, SJ
    TECHNICAL PHYSICS LETTERS, 2005, 31 (07) : 597 - 599
  • [2] Vacuum gauges with emitters based on carbon nanotubes
    S. J. Kim
    Technical Physics Letters, 2005, 31 : 597 - 599
  • [3] A MEMS Pirani Vacuum Gauge Based on Porous Silicon
    Lin, Yuzhe
    Zhang, Zichao
    Tao, Jifang
    Wen, Lianggong
    MICROMACHINES, 2025, 16 (03)
  • [4] High-temperature vacuum pressure sensor using carbon nanotubes
    Ahn, Sung Il
    MATERIALS LETTERS, 2020, 268 (268)
  • [5] Carbon nanotubes and nanofibers synthesized by CVD on nickel coatings deposited with a vacuum arc
    Escobar, M.
    Giuliani, L.
    Candal, R. J.
    Lamas, D. G.
    Caso, A.
    Rubiolo, G.
    Grondona, D.
    Goyanes, S.
    Marquez, A.
    JOURNAL OF ALLOYS AND COMPOUNDS, 2010, 495 (02) : 446 - 449
  • [6] A micro-Pirani vacuum gauge based on micro-hotplate technology
    Zhang, FT
    Tang, Z
    Yu, J
    Jin, RC
    SENSORS AND ACTUATORS A-PHYSICAL, 2006, 126 (02) : 300 - 305
  • [7] Miniature capacitance diaphragm gauge for absolute vacuum measurement
    Han, Xiaodong
    Li, Gang
    Xu, Mahui
    Guo, Chaomao
    Wang, Yongjun
    Feng, Yongjian
    Li, Detian
    MEASUREMENT, 2022, 194
  • [8] Understanding the role of carbon nanotubes in low carbon sulfoaluminate cement-based composite
    Cui, Kai
    Lu, Dong
    Jiang, Ting
    Zhang, Jixin
    Jiang, Zhenliang
    Zhang, Guodong
    Chang, Jun
    Lau, Denvid
    JOURNAL OF CLEANER PRODUCTION, 2023, 416
  • [9] Electromechanical Transducers based on Single-Walled Carbon Nanotubes
    Stampfer, C.
    Jungen, A.
    Helbling, T.
    Durrer, L.
    Hierold, C.
    CARBON NANOTUBES AND ASSOCIATED DEVICES, 2008, 7037
  • [10] Review-The Development of Gas Sensor Based on Carbon Nanotubes
    Septiani, Ni Luh Wulan
    Yuliarto, Brian
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2016, 163 (03) : B97 - B106
12345