Electro-optic polymer cladding ring resonator modulators

被引：64

作者：

Block, Bruce A. ^{[1
]}

Younkin, Todd R. ^{[1
]}

Davids, Paul S. ^{[1
]}

Reshotko, Miriam R. ^{[1
]}

Chang, Peter ^{[1
]}

Polishak, Brent M. ^{[2
]}

Huang, Su ^{[2
]}

Luo, Jingdong ^{[2
,3
]}

Jen, Alex K. Y. ^{[2
,3
]}

机构：

[1] Intel Corp, Components Res, Hillsboro, OR 97124 USA

[2] Univ Washington, Dept Chem, Seattle, WA 98195 USA

[3] Univ Washington, Dept Mat Sci & Engn, Seattle, WA 98195 USA

来源：

OPTICS EXPRESS | 2008年 / 16卷 / 22期

关键词：

D O I：

10.1364/OE.16.018326

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Compact, low capacitance optical modulators are vital for efficient, high-speed chip to chip optical interconnects. Electro-optic (EO) polymer cladding micro-ring resonator modulators have been fabricated and their performance is characterized. Optical modulators with ring diameters smaller than 50 mu m have been demonstrated in a silicon nitride based waveguide system on silicon oxide with a top cladding of an electro-optic polymer. Optical modulation has been observed with clock signals up to 10 GHz. (C) 2008 Optical Society of America

引用

页码：18326 / 18333

页数：8

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