Synthesis of aluminum nitride nanolayers

被引：3

作者：

Akashev, L. A. ^{[1
]}

Popov, N. A.

Kochedykov, V. A.

Shevchenko, V. G.

机构：

[1] Russian Acad Sci, Ural Branch, Inst Solid State Chem, Ekaterinburg 620219, Russia

来源：

TECHNICAL PHYSICS LETTERS | 2013年 / 39卷 / 02期

基金：

俄罗斯基础研究基金会;

关键词：

POWDERS;

D O I：

10.1134/S1063785013020028

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The interaction between the surface of polycrystalline aluminum and nitrogen at a slow heating to a temperature of 623A degrees C and a pressure of 1.25 atm is studied by ellipsometry. It is shown that the formation of a continuous nanolayer of aluminum nitride occurs in a temperature range of 520-580A degrees C and above. The maximum thickness of the synthesized aluminum nitride nanolayer is 32 nm. The formation of nitride on the surface of aluminum is confirmed by IR spectroscopy of powders with a specific surface area of 6.4 m(2)/g.

引用

页码：154 / 156

页数：3

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