Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting

被引：166

作者：

Wu, NaiQi ^{[1
]}

Chu, Feng ^{[2
]}

Chu, Chengbin ^{[3
]}

Zhou, MengChu ^{[4
,5
]}

机构：

[1] Guangdong Univ Technol, Dept Ind Engn, Sch Mechatron Engn, Guangzhou 510006, Guangdong, Peoples R China

[2] Univ Evry Val dEssonne, Lab Informat Biol Integrat & Syst Complexes, EA 4526, F-91020 Evry, France

[3] Ecole Cent Paris, Lab Genie Ind, F-92295 Chatenay Malabry, France

[4] Tongji Univ, Key Lab Embedded Syst & Serv Comp, Minist Educ, Shanghai 200092, Peoples R China

[5] New Jersey Inst Technol, Dept Elect & Comp Engn, Newark, NJ 07102 USA

来源：

IEEE TRANSACTIONS ON SYSTEMS MAN CYBERNETICS-SYSTEMS | 2013年 / 43卷 / 01期

基金：

中国国家自然科学基金;

关键词：

Cluster tool; discrete event system; Petri nets (PNs); scheduling; semiconductor manufacturing; AUTOMATED MANUFACTURING SYSTEMS; STEADY-STATE THROUGHPUT; SCHEDULING ANALYSIS; WINDOW CONSTRAINTS; MULTICLUSTER TOOLS; EVENT GRAPH; DEADLOCK; ROBOTS; HOIST; PERFORMANCE;

D O I：

10.1109/TSMCA.2012.2187890

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

There are wafer fabrication processes in cluster tools that require wafer revisiting. If a swap strategy is applied to dual-arm cluster tools handling wafer revisiting, a three-wafer periodical process is formed with three wafers completed in each period. Such a period contains three cycles in a revisiting process and three cycles in a nonrevisiting one. Hence, analysis and scheduling of such tools become very complicated. In this paper, a Petri net (PN) model is developed to describe their operations. Based on it, it is found that, if a swap strategy is applied, such tools are always in a transient state. A systematic method is then presented to analyze their performance. With the help of the proposed PN model, this work, for the first time, derives the optimality conditions of three-wafer period scheduling. Industrial application examples are given to show the results.

引用

页码：196 / 207

页数：12

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