MEMS for space applications

被引：1

作者：

Miller, LM ^{[1
]}

机构：

[1] CALTECH, Jet Prop Lab, MicroDevices Lab, Pasadena, CA 91109 USA

来源：

DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2 | 1999年 / 3680卷

关键词：

MEMS; Space Applications; Review; Mars Microprobe; microgyroscope; system-on-a-chip;

D O I：

10.1117/12.341193

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Phenomenal advances in MicroElectroMechanical Systems (MEMS) performance has made this technology attractive for the development of micro- and nano-spacecraft. However, much work remains to be done. The space environment is harsh: extreme heat and cold, thermal cycling, radiation effects, and corrosive environments put conventional device designs at risk. Reliability, packaging and flight qualification methodologies need to be developed for MEMS to produce robust devices for a successful future in space micromissions. These issues are discussed in this paper, along with examples of micromissions, MEMS devices in development for space applications, and the ultimate in device integration: a System-On-A-Chip (SOAC).

引用

页码：2 / 11

页数：10

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