Substrate effects on the characteristics of (In2O3)1-x (ZnO)x films

The electrical and the optical properties of (In2O3)(1-x) (ZnO)(x) (IZO) films deposited by the rf magnetron sputtering on plastic substrates, such as polyethylene terephthalate (PET) and poly carbonate (PC), were investigated. The results are compared with those of IZO films deposited on a conventional coring glass (CC) substrate. The average transmittance of the IZO films deposited on plastic substrates is over 80%, irrespective of the substrate, which is comparable to that of IZO films deposited on CC substrates. IZO films deposited on PC or PET substrates show larger resistivities than those deposited on CC substrates. This may be attributed to the fact that compositions, such as H2O or the organic solvent contained in the plastic substrates, are adsorbed into the IZO layer during sputtering. The surface resistance of the IZO films is nearly independent of the substrate and decreases with increasing deposition time. Compared to the IZO films deposited on PET substrates without hard coatings, those deposited on PET substrates with hard coatings show superior electrical stability for thermal environments.