Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique

被引:11
作者
Liu, Mingqiang [1 ]
Li, Bincheng [1 ]
Wang, Yanru [1 ,2 ]
机构
[1] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
[2] Chinese Acad Sci, Grad Sch, Beijing 100090, Peoples R China
关键词
calorimetry; deformation; measurement by laser beam; nanomechanics; optical elements; optical films; optical testing; silicon compounds; thermal lensing; wavefront sensors; COATINGS;
D O I
10.1063/1.3106630
中图分类号
O59 [应用物理学];
学科分类号
摘要
Laser-induced surface deformations of optical components are measured with a combined laser calorimetry (LC) and surface thermal lens (STL) technique. The deformation is calculated from the STL amplitude by employing a simple STL model. It is also directly calculated with a rigorous deformation model by measuring the absorptance of the optical component with LC. Experimentally, the laser-induced surface deformation values of a BK7 coating sample measured by STL and Hartmann wavefront sensing techniques are in excellent agreement with that calculated with the rigorous deformation model. The measurement of subnanometer deformation with the combined LC and STL technique is demonstrated by a fused silica coating sample. The deformation measurement sensitivity and error are estimated to be 10 pm and below 10%, respectively.
引用
收藏
页数:3
相关论文
共 11 条
[1]   Time-resolved thermal mirror for nanoscale surface displacement detection in low absorbing solids Time-resolved thermal mirror for nanoscale surface displacement detection in low absorbing solids [J].
Astrath, N. G. C. ;
Malacarne, L. C. ;
Pedreira, P. R. B. ;
Bento, A. C. ;
Baesso, M. L. ;
Shen, J. .
APPLIED PHYSICS LETTERS, 2007, 91 (19)
[2]   Absorptance behavior of optical coatings for high-average-power laser applications [J].
Chow, R ;
Taylor, JR ;
Wu, ZL .
APPLIED OPTICS, 2000, 39 (04) :650-658
[3]   SINGLE-BEAM INTERFEROMETRY OF A THERMAL BUMP [J].
KUO, PK ;
MUNIDASA, M .
APPLIED OPTICS, 1990, 29 (36) :5326-5331
[4]   3-DIMENSIONAL THEORY OF PULSED PHOTOTHERMAL DEFORMATION [J].
LI, BC .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (02) :482-487
[5]   Pulsed top-hat beam thermal-lens measurement for ultraviolet dielectric coatings [J].
Li, BC ;
Martin, S ;
Welsch, E .
OPTICS LETTERS, 1999, 24 (20) :1398-1400
[6]   In situ measurement on ultraviolet dielectric components by a pulsed top-hat beam thermal lens [J].
Li, BC ;
Martin, S ;
Welsch, E .
APPLIED OPTICS, 2000, 39 (25) :4690-4697
[7]   Nanoscale surface displacement detection in high absorbing solids by time-resolved thermal mirror [J].
Malacarne, L. C. ;
Sato, F. ;
Pedreira, P. R. B. ;
Bento, A. C. ;
Mendes, R. S. ;
Baesso, M. L. ;
Astrath, N. G. C. ;
Shen, J. .
APPLIED PHYSICS LETTERS, 2008, 92 (13)
[8]  
Nowacki W., 1982, THERMOELASTICITY, V3
[9]   Hartmann-Shack wave front measurements for real time determination of laser beam propagation parameters [J].
Schäfer, B ;
Lübbecke, M ;
Mann, K .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2006, 77 (05)
[10]  
Weber M J, 2003, HDB OPTICAL MAT