Electrowetting for Tunable Microoptics

被引：40

作者：

Krogmann, Florian ^{[1
]}

Moench, Wolfgang ^{[1
]}

Zappe, Hans ^{[1
]}

机构：

[1] Univ Freiburg, Dept Microsyst Engn, Lab Microopt, D-79110 Freiburg, Germany

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2008年 / 17卷 / 06期

关键词：

Electrowetting; electrowetting-on-dielectrics (EWOD); liquid lenses; microlenses; microoptics;

D O I：

10.1109/JMEMS.2008.2007256

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The design, fabrication, and optical properties of tunable liquid microoptical components based on electrowetting are presented. Two optical microsystems are discussed: a single liquid microlens with tunable focal length, centered and stabilized in a micromachined positioning structure, and laterally repositionable tunable liquid microlens arrays. The latter employs electrowetting for lateral movement as well as focal length tuning of the optical elements. Through the use of novel microstructuring techniques, a high positioning accuracy may be achieved with low electrode count.

引用

页码：1501 / 1512

页数：12

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