共 50 条
- [41] Ultrafast laser Scribe: An Improved Metal and ILD Ablation Process [J]. 2019 IEEE 69TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2019, : 453 - 460
- [43] Advances and opportunities of ultrafast laser synthesis and processing [J]. MRS BULLETIN, 2016, 41 (12) : 955 - 959
- [45] Ultrafast laser processing of glass-phase materials - mathematical simulation [J]. FUNDAMENTALS OF LASER-ASSISTED MICRO- AND NANOTECHNOLOGIES 2013, 2013, 9065