Electromagnetic optical switch for optical network communication

被引：13

作者：

Shen, SC

Pan, CT

Chou, HP

机构：

[1] ITRI, MIRL, MEMS Res Div, Hsinchu 310, Taiwan

[2] NTHU, Dept Engn & Syst Sci, Hsinchu, Taiwan

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2002年 / 239卷 / 1-3期

关键词：

MEMS; electromagnetic optical switch; excimer laser ablation; permalloy; bulk micromachining;

D O I：

10.1016/S0304-8853(01)00682-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The electromagnetic optical switch combines with Ni/Fe permalloy magnetic circuit design, high aspect ratio microstructure electroplating. bulk micromachining, excimer laser ablation and low temperature wafer bonding, The result shows it can output force 68 mN, deflection angle can reach 82 with 4820 A m. frequency can reach 2 kHz, and bonding strength can be larger than 216 kg cm(2). (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：610 / 613

页数：4

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[2]

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[3]

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Toshiyoshi, H ;

Miyauchi, D ;

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IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1999, 5 (01) :10-17

[5]

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