Correlation of the structural properties of a Pt seed layer with the perpendicular magnetic anisotropy features of full Heusler-based Co2FeAl/MgO/Co2Fe6B2 junctions via a 12-inch scale Si wafer process

被引：10

作者：

Chae, Kyo-Suk ^{[1
,2
]}

Lee, Du-Yeong ^{[1
]}

Shim, Tae-Hun ^{[1
]}

Hong, Jin-Pyo ^{[3
]}

Park, Jea-Gun ^{[1
]}

机构：

[1] Hanyang Univ, Dept Elect, MRAM Ctr, Seoul 133791, South Korea

[2] Samsung Elect Co Ltd, Hwasung City 445701, Gyeonggi Do, South Korea

[3] Hanyang Univ, Dept Phys, Seoul 133791, South Korea

来源：

APPLIED PHYSICS LETTERS | 2013年 / 103卷 / 16期

关键词：

D O I：

10.1063/1.4824306

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We elucidated the interfacial-perpendicular magnetic anisotropy (i-PMA) features of full Heusler-based Co2FeAl/MgO/Co2Fe6B2 magnetic-tunnel-junctions as functions of the structural properties of the Pt seed layer including its thickness and ex situ annealing temperature. All of the samples were prepared in a 12-inch silicon wafer process for real industry applications. The observations of the M-H loops emphasize that a thinner Pt seed layer and a high ex situ annealing temperature enhance the surface roughness of the seed layer, providing better i-PMA characteristics. HR-TEM images of the samples were evaluated to understand the structural effects of thin and thick Pt seed layers. (C) 2013 AIP Publishing LLC.

引用

页数：4

共 14 条

[11] Double MgO-based Perpendicular Magnetic-Tunnel-Junction Spin-valve Structure with a Top Co2Fe6B2 Free Layer using a Single SyAF [Co/Pt]n Layer (vol 8, 2139, 2018) [J].

Choi, Jin-Young ;

Lee, Dong-gi ;

Baek, Jong-Ung ;

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SCIENTIFIC REPORTS, 2018, 8

[12] Dependency of tunneling magnetoresistance ratio on Pt seed-layer thickness for double MgO perpendicular magnetic tunneling junction spin-valves with a top Co2Fe6B2 free layer ex-situ annealed at 400°C [J].

Takemura, Yasutaka ;

Lee, Du-Yeong ;

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NANOTECHNOLOGY, 2016, 27 (48)

[13] Tunneling-Magnetoresistance Ratio Comparison of MgO-Based Perpendicular-Magnetic-Tunneling-Junction Spin Valve Between Top and Bottom Co2Fe6B2 Free Layer Structure [J].

Du-Yeong Lee ;

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Jea-Gun Park .

Nanoscale Research Letters, 2016, 11

[14] Tunneling-Magnetoresistance Ratio Comparison of MgO-Based Perpendicular-Magnetic-Tunneling-Junction Spin Valve Between Top and Bottom Co2Fe6B2 Free Layer Structure [J].

Lee, Du-Yeong ;

Lee, Seung-Eun ;

Shim, Tae-Hun ;

Park, Jea-Gun .

NANOSCALE RESEARCH LETTERS, 2016, 11

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